Hierarchical Design and Test of MEMS

Introduction Microelectromechanical Systems (MEMS) has existed as a technical field since the early 1980’s. Past research has primarily focused on developing new process technologies to support specific applications. As stable process technologies have emerged, many research efforts have shifted towards the design of systems containing hundreds or even thousands of mixeddomain components. As a result, there is a growing need for CAD tools that shorten the design and development time for MEMSbased products. Success in this area depends greatly on new design methodologies that allow complex microsystems of mechanical, electrical, thermal, fluidic, and optical components to be hierarchically represented and simulated. In addition, CAD tools capable of assessing and preventing faulty MEMS behavior are also necessary to ensure the end quality of complex MEMS-based products.